Customized electrostatic chuck
It is possible to propose suitable electrostatic chucks based on the object to be held, its application, and the environment.
Our company develops, manufactures, and sells electrostatic chucks made from various materials to meet our customers' requirements as a comprehensive electrostatic chuck manufacturer. We understand the environment in which our products will be used and the functions required, and through our development and design technology, we propose optimal product specifications. Additionally, we provide high-performance and high-functionality products utilizing advanced manufacturing technology. 【Examples of Optional Features】 ■ Built-in Heater - By integrating stage substrate manufacturing technology with thin heater manufacturing technology, high-precision temperature control is possible. ■ High-Temperature Compatibility - By using ALN ceramic as the material for the electrostatic chuck, it can be used in high-temperature environments up to 500°C. ■ Abnormal Discharge Countermeasures - Our expertise allows us to implement countermeasures against abnormal discharges that tend to occur around gas holes. *For more details, please refer to the PDF document or feel free to contact us.
- Company：クリエイティブテクノロジー
- Price：Other
